基于Matlab的静电执行器控制仿真与研究

Simulation and Research Based on Micro-Electrostatic Micro-actuator

为研究静电执行器的动态性能,本文建立非线性系统静电执行器的数学模型,并在系统静态工作点进行局部线性化。设计静电执行器的Simulink模型,通过在不同输入信号情况下,系统的响应分析,以此研究系统的性能;对于改进型的模型,重点研究了静电执行器的"下拉-释放"动作过程。此动作过程的研究表明,静电执行器的动作过程具有局部稳定性,且存在一个全局固定稳定点。本文通过静电微执行器的控制研究,以期对微机电系统器件的控制仿真与分析提供参考。

In this paper, modeling of electrostatic micro-actuators by an abstract model, and by analyzing a reasonable abstract model, it comes to be some results of simulation analysis and research of MEMS. To study the dynamic performance of electrostatic micro-actuators, due to system of electrostatic micro-actuator is a nonlinear system, therefore, it is significant to analyze the operating point for the local linearization. The authors use simulink of MATLAB to design simnlink model of electrostatic micro-actuators. For the improved model, the system focuses on the electrostatic actuator ＂drop-down ＆ the release ＂ action process. Research of the action shows the process of electrostatic micro-actuators with local stability, and there is a globally stable fixed point. This paper＂ aimed at analyzing electrostatic micro-actuator performance by using a simple circuit simulation model in Matlab. Because the system drop-down phenomenon exists in certain areas of the system unstable operating point. By electrostatic micro-actuators controlling studies and simulation analysis on MEMS devices, it hopes to provide a reference or some help for further studying MEMS.