基于DVD光学读取头的测微力计

Micro-newton Dynamometer Based on a DVD Optical Pick-up Head

为满足微纳米三维接触扫描探头测力的需要,提出了一种基于DVD光学读取头的测微力计。该测微力计由固定及微调支座、L形铜条、平面反射镜、DVD光学读取头和阻尼装置五部分组成。当力作用在L形铜条上时,贴在铜条上的平面反射镜会产生微小位移,该微小位移由DVD光学读取头来感测;通过建立被测力与平面反射镜微位移之间的关系,从而实现微小力的测量。用该测微力计对一个微纳米三维接触扫描探头的测力过程进行了测量,测量结果与对该微纳米三维接触扫描探头的有限元分析结果一致。

In order to measure the force of Micro/nano three-dimensional contact scanning probe, a micro-newton dynamometer based on the DVD optical pickup is designed. The micro-newton dynamometer includes a fixed and fine-tune support, a L-shaped copper strip, a fiat mirror, a DVD optical pickup head and a damping device. When the force to be measured is imposed on the L-shaped copper strip, the fiat mirror atta- ched to the L-shaped copper strip will produce a small displacement, which is measured by the DVD optical pickup head. The relationship be- tween the measured force and the plane mirror＇s micro-displacement is established to measure the small force. The force of a micro/nano three-di- mensional contact scanning probe have been measured. The measurement results are consistent with the finite element analysis result of the three- dimensional micro/nano contact scanning probe.