Verigy 93000短期校准在变化率测试中的应用

Application of Short-term Calibration of Verigy 93000 in Testing of Change Rate

介绍了集成电路电参数变化率对短期校准的需求和Verigy 93000集成电路测试系统的校准方式,研究实现了Verigy 93000集成电路测试系统的短期校准装置,该装置可应用于直流参数变化率测试。

This article describes the short-term calibration requirements of IC electrical parameters＇ change rate and the calibration methods of Verigy 93000 IC test system. We research and set up short-term calibration device of Verigy 93000, which is used for DC parameters＇ change rate.