摘要
首先对无损伤铜薄膜试件进行疲劳试验,测得S—N曲线。然后预制疲劳损伤程度为40%的铜薄膜试件,利用准分子激光器对其进行损伤修复。通过对比激光辐照处理前后试件的剩余寿命,可以得到如下结论,对于损伤程度为40%的25μm铜薄膜试件,最佳修复能量度约为5×103J/m2,最佳脉冲个数约为30;能量密度对于修复效果的影响程度强于脉冲个数的影响程度;运用激光辐照进行损伤修复是切实可行的。
Fatigue test was carried out to obtain S--N curve for undamaged cooper film first. Then specimen with a damage degree of 40% was prepared. Excimer laser was finally used to repair the fatigue damage. By comparing data pre- and post- processing, the main results are as follows： The best energy density is about 5×10^3J/m^2 and the best pulse number is about 30. The influence degree of energy density on repairing effect was stronger than that of pulse number. Laser irradiation processing is a feasible way to damage repair.
出处
《机械强度》
CAS
CSCD
北大核心
2012年第5期757-760,共4页
Journal of Mechanical Strength
基金
国家自然科学基金(50975005
51010006)
北京自然科学基金(3092003)
北京市教育委员会科技计划重点项目科学基金(KZ201010005003)资助项目~~
关键词
激光辐照
铜薄膜
损伤修复
Laser irradiation
Copper film
Damage repair
