2Fischer M,Giousouf M,Schaepperle J,Eichner D,Weinmann M.Electrostatically deflectable polysilicon micromirrors-dynamic behavior and comparison with the results from FEM modeling with ANSYS[J].Sensors and Actautors A,1998,67:89-95
3Mehner J,Kurth S,Billep D,Kaufmann C,KEHR K,Dotzel W.Simulation of gas damping in microstructures with nontrivial geometries[C].In:IEEE Proc.of the MEMS Conference,Heidelberg,Germany,1998,172-177
4Sharipov F.Rarefied gas flow through a long rectangular channel[J].Journal of Vacuum Science & Technology A:Vacuum,Surfaces,and Films,1999,17(5):3062-3066
5Liu S,Davidson A,Lin Q.Simulating nonlinear dynamics and chaos in a MEMS cantilever using Poincare mapping[C].in:Proceedings of the IEEE,Transducers'03,the 12th International Conference on Solid State Sensors Actuators and Microsystems.Boston,8-12 June 2003,1092-1095
6Chang K M,Lee S C,Li S H.squeeze film damping effect on a mems torsion mirror[J].J.of Micromech.Microeng,2002,12:556-561
7Veijola T,Lahdenpera J.The influence of gas-surface interaction on gas film damping in a silicon accelerometer[J].Sensor and Actuators A,1998,66:83-92
8Veijola T,kuisma H,Lahdenpera J,Ryhanen T.Equivlaent-circuit model of the squeezed gas film in a silicon accelerometer.Sensors and Actuators A,1995,48:239-248
9Cheng C C,Feng W.Tuning the quality factor of bulk micromachined structures using squeezed-film damping[J].Microsystem Technologies,2005,11:104-110
10Andrews M,Harris I,Turner G.A comparison of squeeze-film theory with measurements on a microstructure[J].Sensors and Actuators A,1993,36:79-87