摘要
本文对镀层的外观、镀层的附着力以及镀层的厚度的影响因数包括涂层的质量和镀膜工艺参数进行了分析。
The main factors including pre coating's qualities and depositing process which affect the appearance, adhesion and thickness of sputtering film have been discussed in this paper.
出处
《真空》
CAS
北大核心
2000年第4期40-42,共3页
Vacuum