大温差应用环境下的MEMS陀螺零偏补偿研究

Research on Bias Compensation of MEMS Gyroscope under Large Temperature Difference

MEMS陀螺的工艺特点决定了其零偏随温度呈现非线性变化的特点。针对工业现场实际应用环境温度变化范围大、分段补偿模型断点处不连贯和补偿温度范围小等问题,提出了一种新型的无需分段、全温度区间线性回归补偿模型;并且针对MEMS陀螺启动不稳定性因素对零偏造成的影响,改进的补偿模型可有效抑制陀螺上电时刻的零偏。经过实验验证:该模型补偿后的数据较陀螺原始数据零偏提高了将近3个数量级,从2.9027°/s提高到0.0091°/s,并且该算法相对简单易于编程实现,具有很好的工程实用价值。

The bias of MEMS gyroscope showing non-linear changes with temperature depends on gyroscope process characteristics.For enormous variation range of actual application ambient temperature in the industrial scene,segmented compensation model breakpoint is not coherent and the range temperature compensation is small,proposed a new kind of linear regression compensation model,which do not need to segmenting and for the full temperature range.Aiming at the impact to bias from the MEMS gyroscope instability factors at the start time,the gyroscope bias can be effectively inhibited by the improved compensation model when power up.After experimental validation,compared the compensation data of the model with the gyro raw data,nearly three orders of magnitude bias is improved,from 2.902 7°/s to 0.009 1°/s.The algorithm is relatively simple and easy to program,and has good practical value.