N_2射频放电带电粒子(e,N_2^+,N^+)的PIC-MC模拟

The simulations of the charged particles(e,N^2^+,N^+) in Nitrogen radio frequency discharge by PIC-MC model

采用PIC-MC自洽模型,模拟了氮气电容性耦合射频放电的微观等离子体过程及带电粒子(e,N2+,N+)的行为。结果表明,离子(N2+,N+)的运动状态滞后瞬时射频电场的变化;在两极附近,N2+具较高密度,但能量较低,N+具较低的密度但能量较高,两者的密度差6倍左右。两种离子轰击射频电极的能量分布变化规律类似,随放电参数变化,离子(N2+,N+)能量变化显著,其密度变化不明显。模拟的电子能量几率分布与测量结果一致。

N2 capacitively coupled rf discharge was simulated by PIC/MCC model, in which we computed the rf electric field, the density and mean energy of charged particles （e, N2^＋, N＋）, the energy distribution of ions （N2^＋, N^＋） bombarding rf electrode and their variation by following different discharge parameter （p, Vrf）. The simulated results show that, ions （N2^＋, N^＋） seem to follow the electric field with a slight delay; the ions N^＋ have higher energy near the two electrode, the ions N2^＋ have higher density, and the N2^＋ density is about six times of the N^＋ density. With as the change of discharge parameter, the change of the energy of ions （N2^＋, N^＋） bombarding rf electrode is obvious, but the change of their density is slightly unconspicuous. The simulated results for electron energy probability distribution function are agreement with the measured results.