CrN/MoS_2固体自润滑复合膜渗硫层相结构研究

Study on Phase Structure in CrN/MoS_2 Solid Self-lubricant Composite Film Sulfurized Layer

采用扫锚电子显微镜(Scanning Electron Microscope,SEM)对CrN/MoS2固体自润滑复合膜表面形貌进行了观察,利用X射线光电子能谱(X-ray Photoelectron Spectroscopy,XPS)和俄歇电子能谱仪(Auger Electron Spectrosco-py,AES)对复合膜渗硫层的相结构及剖面元素分布进行了研究。结果表明:经低温离子渗硫处理后,在复合涂层中成功合成MoS2自润滑相,并伴有少量SO2、CrSO4生成。研究发现:渗硫层被氧化是源于渗硫过程中残留的氧气和样品保存过程中接触的空气;用真空封装等隔氧保存方式可防止样品存储过程中渗硫层被氧化;改善渗硫工艺,杜绝渗硫过程中渗硫层被氧化,可以获得单一成分的MoS2层。

The SEM （Scanning Electron Microscope） is utilized to observe and analyze the microstructure of CrN/MoS2 solid self-lubricant composite coating. The phase structure and section element distribution in the sulfurized layer of the composite coating are investigated through X-ray Photo Electron Spectrometry （XPS） and Auger Electron Spectroscopy （AES）. The results show that the MoS2 self-lubricant phase with SO2 ＆ CrSO4 is constituted by the sulfur which is infiltrated in low temperature ion. The oxidation in sulfurized layer is caused by the residual gas in the process of sulfurizing and the air contacted by stored samples. It is found that the oxidation in the sulfurized layer could be avoided by means of cutting off oxygen, such as vacuum packaging. The single-ingredient MoS2 layer could be obtained through improving the technological conditions of sulfurizing and avoiding oxidation of the sulfurized layer in the process of sulfurizing.