摘要
实验通过二极管记录透射光信号随脉冲个数变化关系以及观测样品烧蚀形貌来研究不同实验条件对激光烧蚀的影响。使用的样品是厚度为50μm铝箔。实验中通过研究不同变量:激光焦点与样品的相对位置、激光的能量、背景气体压强以及脉冲形状对烧蚀加工过程和结果的影响,从而获得较好烧蚀效果的条件,达到控制烧蚀加工过程的目的。特别是通过使用不同形状的脉冲和具有一定规律的脉冲序列对样品进行烧蚀,发现某些形状的整形脉冲烧蚀结果明显优于变换极限脉冲。说明脉冲整形作为一种新的技术可以在激光精细钻孔领域得到更深入的研究和应用。
This paper studies the ablation of aluminum foil （50 μm thickness） under various conditions by observing the morphology of ablation caves and by analyzing the relationship of the photodiode signal of transmitted light and the number of pul- ses to penetration. In order to obtain better condition of ablation, several variable quantities in the experiment are tested, which are the pulse energy, position of laser focus relative to sample surface, ambient pressure and pulse shape. Preferable results are obtained by using some specific shaped pulses to ablate samples, compared to those obtained with transform-limited pulses, which means laser pulse shaping technology can be of important usage and application in micromachining metal material.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2012年第10期2381-2385,共5页
High Power Laser and Particle Beams
基金
国家自然科学基金项目(10974070)
关键词
整形脉冲
烧蚀
激光能量
气体压强
激光焦点位置
shaped pulse
ablation
laser energy
ambient pressure
laser focus position
