纳米声学及近场声成像技术

Nanoacoustics and nearfield acoustic imaging techniques

纳米声学是近年来迅速发展的新的学科领域,旨在亚微米和纳米尺度上来"听到"和"看到"我们尚未发现的物质世界。而近场声成像技术,像扫描探针声显微术(Scanning ProbeAcoustic Microscopy,SPAM)和压电响应力显微术(Piezoresponce Force Microscopy,PFM)等,不仅具有亚微米和纳米分辨力,而且能方便地对试样微区的表面形貌,材料的力学和电学等性质进行成像,是开展纳米声学研究的有效手段。文章结合实验结果,对SPAM和PFM等近场声成像技术作了简要介绍。

Nanoacoustics is a new quickly developing field in Acoustics recently, which aims at ＂seeing＂ and ＂hearing＂ the undiscovered small world. The nearfield acoustic imaging techniques, such as Scanning Probe Acoustic Microscopy （SPAM） and Piezoresponce Force Microscopy （PFM）, can not only get topography image in nano-material, but also easily obtain the images about mechanical and electric properties of samples with micro and nanometer spatial resolu- tion. Therefore, the nearfield acoustic imaging techniques are very important to Nanoacoustics and they will be intro- duced briefly with experimental results in this paper.