Roll-to-roll MPECVD中氧气浓度对氧化硅薄膜性能的影响

Oxygen Concentration and Properties of SiO_x Coating Deposited in Roll-to-Roll Process

介绍了用磁增强等离子体化学气相沉积技术在连续(Roll-to-Roll)系统中,于PET薄膜表面沉积纳米SiOx阻隔层薄膜的工艺。研究不同的工艺条件下,薄膜的阻隔性能,硬度及其影响的因素。实验得到,在单体和氧气的混合反应气体,氧气的比例提高,薄膜中杂质成分较少,薄膜趋向于较硬的类石英膜,薄膜的铅笔硬度提高。通过红外光谱仪对薄膜成分进行分析,给出影响薄膜硬度和原因。

The SiOx coating was grown by magnetized plasma enhanced chemical vapor deposition on the flexible polyethylene terephthalate substrates in a roll-to-roll process.The impacts of the deposition conditions,including the pressure,ratio of the gas flow rates,and oxygen concentration,on the contents and properties of the SiOx films were evaluated.The SiOx films were characterized with Fourier transform infrared spectroscopy and conventional mechanical probes.The results show that the oxygen concentration significantly affects the stoichiometries and mechanical properties of the SiOx coating.For instance,an increase of the oxygen concentration resulted in formation of quartz-like SiOx coating with higher surface hardness,less contents of H and C impurities.Possible mechanisms responsible for the property improvement were also tentatively discussed.