计量圆光栅的制作工艺及质量参数研究

The Research on Manufacture and Quality Parameter of Metrology Circular Grating

计量圆光栅是光电编码器中的核心元件,它的精度直接影响光电编码器的精度,因此,制作出高精度的计量圆光栅是研制高精度光电编码器的前提。详细介绍了计量圆光栅的制作工艺和衡量计量圆光栅质量的参数,并通过实验对计量圆光栅的制作工艺和质量参数进行了对比,为设计高精度角度传感器提供了一定的理论参考。

Metrology circular grating is the core component which affects the precision of photoelectric encoder directly.So, lion of developing high precision photoelectric encoder.ln this of photoelectric encoder.Its precision is the main factor high precision metrology circular grating is lhe precondi- paper, the fabrication technology and the parameters of metrology circular grating are introduced in detail, and the fabrication technology and parameters of metrology circular grating are compared by specific experiment.It provides certain theory reference to design high precision angle sensor.