电解加工对金属计量光栅表面粗糙度影响的研究

Research on Electrolysis Machining Effecting the Surface Roughness of Metallic Metrology Grating

金属计量光栅通常采用电解加工的方式制作,由于具有传统K9玻璃、浮法玻璃和树脂基片等不可替代的优势,以其100%的透过率,和抗震、防尘、耐高温、耐腐蚀、重量轻的特性,被广泛应用在矿业、冶金、建材、化工、军工等行业中。电解加工是用电解方法使金属阳极溶解,可以获得较高的刻线准确度,但有时粗糙度有所下降。本文主要探讨电解加工对金属计量光栅表面粗糙度的影响,为提高金属计量光栅的表面质量提供机理参考。

Electrolysis machining is used to manufacture metallic metrology grating usually,Metallic metrology grating has many advantages such as 100% permeance rate, seismic, dustproof, high-temperature resistance, corrosive resistance, and light.K9 glass, float glass and resin haven＇ t these advantages.So, metallic metrology grating is used many industries widely such as mining, metallurgy, building, chemicaland war industry.Electrolysis machining is using electrolysis melhod to make anode of metal dissolve, and upper precision and roughness are obtained.But, the roughness of metallic metrolo- gy grating becomes less sometimes.In this paper, the effect on metallic metrology grating is using eleclrolysis machining is discussed, which offers mechanism reference of improving surface roughness of metallic metrology grating farther.