摘要
激光波前分布作为ISO新列入的衡量激光光束质量的重要参数,对其有效、准确地测量显得十分重要。根据哈特曼波前测量原理,详细介绍了基于哈特曼传感器的激光波前分布测量装置、哈特曼传感器波前斜率测量方法和常用波前重构算法,引入一种定标哈特曼传感器针孔阵列与CCD间距的方法,分析定标实验数据及使用已定标的哈特曼波前分析仪测量波前的实验结果。实验证明定标方法可靠有效。
It is essential to accurately measure the laser beam wavefront distribution, which is a key parameter listed by IS0 to characterize the laser beam propagation properties. The paper specified the methods for measuring the laser beam wavefront distribution with Hartmann sensor, which includes measurement equipment, test principle of wavefront slope and wavefront reconstruction algorithm. Furthermore, a method to determine the distance between pinholes array and CCD in the Hartmann sensor was introduced, and the wavefront measurement results using the calibrated Hartmann sensor are analyzed. The experiment results indicate that the method to determine the distance between pinholes array and CCD is credible and accurate.
出处
《中国测试》
CAS
北大核心
2012年第5期22-24,28,共4页
China Measurement & Test
基金
国家科技部科技支撑计划项目(2006BAF06B05)
