摘要
为了测试分析微陀螺驱动模态振动系统的线性度,使驱动模态在静电驱动信号激励下产生稳定的线性振动,采用计算机视觉测量方法,使用高速摄像机获取微陀螺驱动模态在频率固定的调幅驱动电压信号激励下的振动位移响应视频图像;通过对运动时序图像的处理、目标识别与运动参数测量,获得振动位移的时变曲线.进一步得到驱动电压幅值变化与振动位移幅值的变化关系,分析结果表明,该方法便于对微陀螺振动系统的线性度进行测试分析.
A balanced vibration of driving module excited by electrostatic driving signal is the working base for MEMS gyroscope. In order to analyze the linearity of the vibration system, a method based on computer vision is applied to detect the vibration process, which works with the help of high-speed vidicon to acquire the video images of vibration displacement of gyroscope driving module, under the AM （amplitude modulation） driving voltage signal with inherent frequency. By means of image processing, target identifying and motion parameter extracting from the video images, the vibration of the gyroscope with time variation could be obtained. Finally, linearity of the vibration system could be analyzed by focusing on the displacement of vibration responding to the amplitude of driving voltage signal.
出处
《北京理工大学学报》
EI
CAS
CSCD
北大核心
2012年第8期790-794,837,共6页
Transactions of Beijing Institute of Technology
基金
国家部委预研项目(0940402)
