摘要
介绍了SF6绝缘气体分解引发的电子枪高压故障的查找和排除方法,以及Tecnai G20透射电镜日常维护的一些经验与体会.
The checking and removal methods for the HV troubleshooting caused by SF6 decomposition, and some experiences in daily maintenance on Tecnai G20 TEM are introduced.
出处
《分析测试技术与仪器》
CAS
2012年第3期194-195,共2页
Analysis and Testing Technology and Instruments
