摘要
介绍了240mm×180mm矩形口径离轴双曲面反射镜的加工与检测。提出了一种通过配块把矩形镜拼接成母镜来实现离轴镜加工的方法。完成了最佳比较球面和最大非球面度等工艺参数的计算。抛光阶段的非球面检测采用零位补偿法,其中零位补偿器是补偿检验中的关键元件。该离轴双曲面镜的最终面形RMS达到了0.02λ,满足了设计要求。
The manufacture and test of 240mm× 180mm rectangle aperture off-axis hyperbolic mirror is introduced. A new way of rectangle mirror spliced into master mirror by distribution block to implement off-axis mirror＇s processing is proposed. The calculation of the process parameters of best-fit sphere and maximum aspheric is completed. In polishing process, null compensation testing is used to measure the surface error of aspheric mirror. Null corrector is the important component in compensation testing. The polishing surface error RMS of the off-axis hyperbolic mirror is 0. 02λ. The de- sign requirements are satisfied.
出处
《光学技术》
CAS
CSCD
北大核心
2012年第5期607-610,共4页
Optical Technique
关键词
离轴非球面
拼接
非球面抛光
零位补偿法
off-axis aspheric
spliced
aspheric polishing
null compensation testing
