一种新型变谐式微型压力传感器的结构设计

Design of the New Micro Resonant Pressure Sensor

本文采用MEMS技术设计了一种新型变谐式微型压力传感器,对其变谐原理、驱动理论及检测理论等进行了深入的研究。当对制作出的样件施加不同压强的气体时,记录测量数据;测试结果表明：该微型压力传感器的重复性和迟滞性保持在0.1%左右,基本满足工业领域的测量标准,对其在工业领域的应用提供了重要的研究价值。

In this paper, a new micro resonant pressure sensor was investigated. Firstly, it was presented that the principle of the variable resonant frequency and the method of comb-driving. Then the detection theory was deeply researched. Finally, the measure- ment results was recorded when the pressure of the input air was varied. The experimental results show that the repeatability and the hysteresis was about 0.1% and basically meet the industrial demand. Therefore, the research of this paper has significant reference value to the application of the resonant pressure sensor.