应用于太阳能电池的AZO透明导电薄膜光学性质研究

Optical Properties of AZO Transparent Conductive Films for Solar Cells

以铝掺杂氧化锌陶瓷靶作为溅射源,采用射频磁控溅射工艺在玻璃衬底上制备了掺铝氧化锌(AZO)透明导电薄膜,利用全光谱拟合法计算了AZO薄膜的光学常数和厚度,研究了厚度对AZO薄膜光学性质的影响.结果表明:拟合光谱曲线与实测光谱曲线一致,薄膜的光学性能与厚度密切相关,AZO薄膜折射率表现为正常的色散特性.另外还采用包络法计算了AZO薄膜的折射率和厚度,两种方法所得结果基本相符.

Transparent conductive aluminum-doped zinc oxide （AZO） films were prepared on the glass substrates by radio frequency magnetron sputtering technique using a sintered ceramic disc of ZnO mixed with A1203 as a target. Based on the measured optical transmittance spectra, the optical constants and thickness of the films were calculated using the method of whole optical spectrum fitting, and the influence of thickness on the optical properties of the AZO films was investigated. The results show that the fitting curves are in satisfactory agreement with the observation data. The optical constants are closely related to the thickness of the films and the refractive index possesses the normal dispersion characteristics. Furthermore, the optical constants were determined from the measured transmittance spectra using the envelope method, and the results are consonant with those determined from the spectrum fitting method.