扫描电子显微镜的结构及对样品的制备

The Structure of Scanning Electron Microscope and the Preparation of Sample

扫描电子显微镜作为一种有效的分析工具,可对多种材料的表面形貌进行观察,使用范围广泛。本文论述了扫描电子显微镜的原理及结构,介绍了样品导电处理的常见方法,重点介绍了离子溅射法和真空蒸发法,并对二者的特点进行了简单总结。

As an effective tool of analysis,scanning electron microscopy was widely used to observe a variety of material surface morphologies.The principle and structure of scanning electron microscope and the common method of conductive treatment for samples were introduced.The ion sputtering method and vacuum evaporation method were elaborated prominently,and their features were summarized.