一种用于电子装备的硅片传输机械手

A Wafer Transfer Manipulator Used in Electronic Equipment

机械手替代人工完成硅片传输可以大幅提高生产效率,传输精度和降低碎片率,机械手的使用是现代电子装备自动化的重要标志。介绍了适用于硅片传输的具有x、y、z、θ向运动功能的机械手及技术指标,重点从总体效率要求及负载对电机的受力进行详细计算,并对x、y向底座的设计做了详细描述;该机械手已应用于生产线的设备上,满足设计要求。

Manipulator used to replace the manual handing of wafer can significantly improve the efficiency of production,transmission accuracy,and reduce the fragment rate,the use of the manipulator is an important symbol of modern electronic equipment automation.The article introduces a manipulator with X,Y,Z,θmovement function,which is used on the silicon transmission,and the technical specification.it focuses on the requirements of the overall efficiency and the load on the motor to conduct a detailed calculation,and describes the X、Ybase in detail;the manipulator has used in production line equipment and met the demand.