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Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator 被引量:2

Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator
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摘要 The effects of manufacturing errors on transmission characteristics are analyzed for a polymer vertical coupling microring resonator.Calculated results show that the errors cause a shift and shape change of the transmission spectrum compared to the designed case without errors.Furthermore,accumulation and compensation for the errors is researched.In order to realize the normal filtering for the fabricated microring resonator device,some allowed errors are discussed. The effects of manufacturing errors on transmission characteristics are analyzed for a polymer vertical coupling microring resonator.Calculated results show that the errors cause a shift and shape change of the transmission spectrum compared to the designed case without errors.Furthermore,accumulation and compensation for the errors is researched.In order to realize the normal filtering for the fabricated microring resonator device,some allowed errors are discussed.
出处 《Journal of Semiconductors》 EI CAS CSCD 2012年第10期58-61,共4页 半导体学报(英文版)
基金 supported by the Science and Technology Development of Jilin Province.China(Nos.20110320.201201078)
关键词 microring resonator manufacturing error POLYMER transmission spectrum microring resonator manufacturing error polymer transmission spectrum
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参考文献14

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同被引文献14

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