磷硼元素在多晶硅中的研究

Phosphorus boron element in polysilicon research

三氯氢硅精馏提纯除杂质，硼系化合物的物化性质与三氯氢硅比较相近，硼系化合物的分离成为三氯氢硅精馏提纯的难点与重点。通过长期的生产观察和分析数据，硼系化合物在三氯氢硅中得存在形式进行分类。

Pick trichloro hydrogen silicon rectifying purification and removing impurity boron compound, physicochemical properties and trichlorosilane quite similar, boron compound separation as the trichloro hydrogen silicon rectification and purification of the difficult and key points. Through long - term production of observation and analysis of data, boron compounds in the trichloro hydrogen silicon in the presence of form classification.