z-切割铌酸锂质子交换平板波导的退火过程研究

Theoritical Modeling and Characterization of Annealed Proton-exchanged Planar Waveguides in z-cut LiNbO_3

研究了退火质子交换LiNbO3平板波导的制作和表征 ,应用“选择零元法”研究了退火后折射率分布 ,建立了波导参数和制作条件的联系 ,获得了导波层的色散关系 。

An annealed proton exchange LiNbO 3 waveguides are fabricated and characterized in this paper. The refractive index profile after annealing is obtained by “selecting zero element” method. The empirical relations between waveguides parameter and fabrication conditions are established. The dispersion equation is also studied in guided layer. The results are useful for applications of annealed proton exchanged waveguides in photonics devices.