摘要
精密测量技术是精密工程领域的一项重要研究内容。本文利用微动平台,二次开发控制软件,进行精密控制。为了克服回程误差,选择精度更高的光栅尺进行测量,整个测量系统组成伺服反馈系统,测量软件上进行闭环,一键设定到位,精度能达到0.2μm,适合于各种单自由度或多自由度小载荷精密移动领域。
Precision measurement technology plays an important role in the precision engineering fields.In this paper,using micro platform to the secondary development of control software and realizing precision control.In order to overcome the return error,choosing higher precision measurement of grating ruler.The entire measurement system is composed of servo feedback system.Measurement software on the closed-loop,a key set in place,and accuracy can reach 0.2μm.The system was suitable for a variety of single degree of freedom or multi-degree-of-freedom of small load precise mobile fields.
出处
《木材加工机械》
北大核心
2012年第4期19-21,39,共4页
Wood Processing Machinery
关键词
精密测量
光栅尺
微动平台
反馈控制
设计
precision measurement； grating ruler； Micro platform； feedback control； design
