垂直叠阵半导体激光器输出光束均匀化的研究

Study on the beam homogenization for the semiconductor laser vertical stack

本文针对垂直叠阵半导体激光器提出了基于棱镜锥体的光束均匀器件,利用软件ZEMAX仿真了具有正方形和正三角形输出端面的棱镜锥体输出光束特性,研究表明,正三角形输出端面棱镜锥体可以实现均匀的光强分布,并且快慢轴方向上的光束发散角度近似相等。

The beam homogenizer are proposed based on the glass prisms for the semiconductor laser vertical stack. The properties of the output beam are analyzed for the glass prisms with square and equilateral triangle output facets, respectively. The numerical simulations are based on the soft ZEMAX. The results show that the uniform intensity distribution of the output beam can be obtained by the glass prism with equilateral triangle output facet, and the beam divergences at the slow and fast axis are nearly equal.