光学邻近效应的产生机理分析

Analysis of physical mechanism on optical proximity effect

基于部分相干成像理论 ,考虑了投影曝光系统成像的非线性滤波特点 ,分析了投影光刻中的光学邻近效应 (OPE)产生的机理 ,模拟了掩模上线条的线宽、线间距的变化对光刻成像质量的影响。

Based on partial coherent imaging theory and nonlinear filter characteristic of projection system for the aerial image,we analyze the physical mechanism on Optical Proximity Effect.The simulation imaging patterns of the different line or space width are given for analyzing image quality.