MEVVA离子源金属掺杂蓝宝石着色的研究

INVESTIGATION ON COLORATION OF METAL-DOPED SAPPHIRE BY MEVVA ION SOURCE

利用金属蒸气真空弧 (MEVVA)离子源将金属离子 (Co+ ,Fe+ 和Nd+ )掺杂到无色人工合成蓝宝石中 .研究在不同元素的注入条件下和退火过程中蓝宝石的着色情况 .利用RBS研究掺杂元素在蓝宝石表面的分布状况 ,XRD分析蓝宝石金属掺杂层的物相变化 .通过对金属掺杂蓝宝石的可见光吸收的测试 ,获得掺杂元素与蓝宝石着色的关系 .

Colorless synthetic sapphires are implanted with various met al ions such as Co- +, Fe- + and Nd- + by use of MEVVA ion source. Col oration of metal-doped sapphires is investigated by varying the conditions of i on implantation and thermal annealing. The phases of metal-doped layer in synth etic sapphires are determined by X-ray diffractometer (XRD). The concentration profiles of element in the metal-doped layers are measured by Rutherford backscattering spectroscopy (RBS). The absorption of metal-doped sa pphires in visible range is studied by means of ultra-violet and visible spectr ometer.