用于扫描刻蚀加工的微悬臂梁优化设计

Optimal design on microcantilever for scanning etching manufacture

扫描刻蚀加工是一种基于并行探针驱动、集成微小等离子体刻蚀原理的新型微纳米加工手段。特种悬臂梁是扫描刻蚀加工系统中的核心器件,其性能直接影响到系统的可靠性。该特种悬臂梁为集成压电陶瓷驱动薄膜的多层复合梁,在加工工艺过程中所引起的材料内部的残余应力,将导致复合梁加工释放后的弯曲变形,影响扫描刻蚀加工系统的性能。基于弹性薄板理论建立含残余应力项的多层复合梁的理论模型。利用有限元法对多层复合梁进行数值仿真,结合田口优化方法,对多层薄膜的厚度进行优化设计。

Scanning etching manufacture is a nanofabrication method based on microplasma etching and parallel probe actuation.The piezoelectrical microcantilever is the key component of the system.The residual stress generated during the fabrication process will cause the microcantilever bending and affect the performance of system.A theoretical model of microcantilever considering residual stress is developed based on elastic plate theory and verified with FEM.Combined with taguchi method,the optimal design on the thickness of multi-layer is carried out.