铈、铽和铥的溅射产额模拟及溅射公式的参数

Simulation the Sputtering Yield of Ce,Tb,Tm and the Formula of Sputtering Yields’ Parameter

简单介绍了Sigmund的理论和一些基于此理论的其它经验公式,描述了YAMAMURA半经验公式的发展过程.采用ACAT模拟程序和YAMAMURA半经验公式模拟和计算了铈、铽和铥等的溅射产额,并对两种结果进行了对比和分析.由分析结果估计了YAMAMURA半经验公式计算铈的经验参数,采用该参数的公式计算和模拟进行了比较,结果符合的很好.

The Sigmund’s theory and other empirical formulas based on this theory were briefly introduced.The development of YAMAMURA’S Semiempirical formula was described.Sputtering yield’s of Ce,Tb,Tm was Simulated and calculated by using ACAT code and YAMAMURA’S Semiempirical formula,and the comparative analysis of the results obtained by the two metholds were given.In this paper,after estimated Semiempirical parameters of YAMAMURA’S Semiempirical formula for calculating Ce,we performed both the simulation and analytical calculation and found that the results were coincident each other very well.