碳纳米涂层材料的二次电子发射系数及工艺研究

SEY and process of nano-carbon coating material

采用电泳沉积制备薄膜的方法,在铝合金镀银片上均匀的涂覆纳米碳涂层。研究了不同的电泳电压及电泳时间对涂层形貌结构的影响。扫描电子显微镜(SEM)、二次电子发射系数(SEY)测试结果表明,保持阴阳极间距为1cm,在30V的直流电压下电泳15min所获得的样片涂层均匀、连续、致密且具有明显的陷阱结构。实验表明,其SEY最大值σmax达到2.03,对应的入射能量为500eV,E1能量点在60eV。使用Ar离子轰击清洗表面10min后,样片的SEY最大值σmax达到1.76,对应的入射能量Emax为400eV,E1能量点在80eV。

The nano-carbon powders were coated on the surface of silver-gilt aluminium alloy by the electrophoretic depo- sition （EPD）. In this paper, the effect of the different electrophoretic coltage and the electropgoretic time on the morphology structure of coating is studied. Scanning electron microscopy （SEM） measurements reveal that the carbon thin-film electro- phoretically deposited for 15 min at a deposition voltage of 30 V and a electrode separation of 1 cm is uniform and continuous, and has obvious granulatedstructure. The secondary election emission yield （SEY） measurements reveal the secondary election emission （SEE） properties with a of 60 eV and a maximum SEY of 2.03 at 500 eV. After Ar ion bombardment for 10 min were employed to clean the surface, SEE properties with a of 80 eV and a SEY maximum of the sample wafer can reach 1.76 at 400 eV.