基于声表面波技术实现微通道内微流体的融合

Fusion of Micro Fluids in Microchannel Based on Surface Acoustic Wave Technology

提出了一种新的油相微通道内微流体融合方法。在128°YX-LiNbO3基片上光刻叉指换能器(IDT)和反射栅,模塑法制作的聚二甲基硅氧烷(PDMS)微通道贴合于压电基片的声路径上,在PDMS微通道内采用微量进样器注入石蜡油和待融合微流体。经功率放大器放大后的射频(RF)电信号加到IDT上,激发声表面波(SAW),驱动微通道内的待融合微流体,实现其融合。实验结果表明,在SAW作用下,微通道内微流体的融合决定于加到IDT上RF信号功率、待融合微流体直径和待融合微流体间距。

A method for fusing microfluids suspended into oil fluid in a micro-channel is proposed in this paper.An IDT and a reflector were fabricated on the 128 YX-LiNbO3 substrate.A PDMS microchannel made by the molding method was mounted onto the acoustic path of the piezoelectric substrate,into which the paraffin oil and micro fluids to be fused were injected by a micro-injector.A RF signal amplified by a power amplifier was added on an IDT to excite surface acoustic wave and the micro fluids to be fused in the micro-channel was actuated to realize the fusion.The experiment showed that the fusion of micro fluidics was depended on the signal power added on the IDT,the diameter of the micro fluidics to be fused and the space between two micro fluids.