石英MEMS陀螺检测模块的测试方法研究

Study on Testing Methods of Detection Module of the Quartz MEMS Gyroscope

提出了一种石英微机械(MEMS)陀螺检测模块的测试方法和测试系统方案。该方法仅将检测模块的输入/输出端口接入测试系统,无需其他位置的信号注入和引出,即可实现增益、相位、频带、阻尼等电路特性的测试和标定,适用于生产过程对检测模块的快速测试及研制过程对检测模块的性能分析。

A testing method and a test system scheme for the detection module of quartz MEMS gyroscope is proposed in this paper.The test and calibration of the circuit parameters such as gain,phase,bandwidth and damping ratio can be carried out only by connecting the input/output port of the detection module with the test system and no need of input and output of other position signals.The methods is suitable for the fast testing of detection module of quartz MEMS gyroscope during the production process and the performance analysis of the detection module during the development of quartz MEMS gyroscope.