直拉式单晶炉动态性能分析与预测

Dynamic Characteristic Analysis and Prediction for CZ Single Crystal Furnace

采用弹簧-阻尼单元模拟直拉式单晶炉结合部的连接,建立TDR-120型直拉式单晶炉整机动力学分析模型。利用ANSYS软件进行模态分析,获得了该类型单晶炉结构的振动特性,并将模拟结果与采用刚性连接的模拟结果进行对比。结果表明,本文建立的模型具有较高的准确性,能够分析和预测直拉式单晶炉的动态性能。

The dynamic model of TDR-120 CZ single crystal furnace is established using the spring-damper elements to simulate the bolt connections of junctions.Modal analysis is carried out with ANSYS software so that the structure＇s vibration character of this type of single crystal furnace is obtained and compared with the simulation results of rigid connection.The results show that the model established in this paper is of high accuracy and can be used to analyse and forecast the dynamic characteristic of Czochralski single crystal furnace.