摘要
拥有众多优良性能的SrTiO3薄膜已经受到了人们的广泛关注。本文首先对SrTiO3薄膜的性质和应用进行了简单介绍,然后从物理和化学两大类方法着重对其现有制备技术及研究进展进行了全面的综述,文章最后对SrTiO3薄膜的制备及器件研究领域进行了展望。
SrTiO3 thin film has been paid more attention for its excellent capability. Properties and application of SrTiO3 thin film were introduced firstly, then the preparation technic and research actuality with physical and chemical method were summarized in detail, at last the prospect of research field of SrTiO3 thin film preparation and organ was put forward.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2012年第5期1185-1189,共5页
Bulletin of the Chinese Ceramic Society
基金
唐山市科学技术研究与发展指导计划项目(No.11110214a)
唐山学院科研项目(No.11001B)
