高精度不可见内回转曲面在线自适应测量

The High-Precision Adaptive Measurement of Invisible Surface of Online Rotary Workpiece

本文介绍一种测量精度为± 2微米的高精度计算机辅助二维在线测量系统的测量原理和方法。分析了系统精度 ,用双频激光干涉仪测量系统组成部分的误差 ,并通过软件方法进行补偿。用最小二乘原理对燕尾榫槽轮廓度加工误差进行误差分离和测量信息反馈 ,Minimax方法对轮廓度加工误差进行最优计算。

This paper presents the measurement principle and the method of a computer aided two-dimensional online measuring system with a high measuring accuracy of ±2μm. The system accuracy is analyzed, and the systematic error is measured by 5528A Laser Measurment System and calibrated by software. We isolate the manufacturing error of mortise by least square critier and the measured information is feedback to manipulator. Finally, the manufacturing error of mortise has been computed optimally through the Minimax critier.