磁光调制锁相椭偏仪与多层磁光薄膜测试系统

Magnetooptic Modulating Phase Locking Ellipsometer and Measurement of Multilayer Magnetooptic Thin Films

磁光调制锁相椭偏仪采用交流法拉第磁光调制及相敏检波来检测消光点 ,具有抗干扰能力强 ,角分辨能力高等优点。本文采用了自制的关键部件 :“高线性法拉第磁光调制器”与反馈电路来寻找消光点 ,实现了小角度偏转数字显示 ,具有速度快 ,准确性高的特点 ,而且使国产椭偏仪的角分辨由 0 .1°提高至 0 .0 1°,达到国外消光椭偏仪的水平。而且该椭偏仪的研制成功对国产磁光盘质量提高具有极大的促进作用。

The magnetooptic self nulled ellipsometer,with ac Farady magnetooptic modulating and phase locking to detect nulled point,has the high abilities of prevent interference and angular recognize.This paper used the “high liner Farady magnetooptic modulator”which we have successfully made and the feedback circuit to search for nulled point,enable it possible to show digitally small angle with the high speed and accuracy,developed our country's ellipsometer's angular recognize from 0 1° to 0 01° and to the level of nulled ellipsomter of advanced country.The successfully developed of this ellipsometer greatly stimulates our country's magnetooptic disk qualities.