超精密加工的三维表面形貌预测

Prediction of 3-D Surface Topography in Ultra-precision Machining

描述并建立了仿真超精密加工的三维表面形貌模型。三维表面形貌模型由切削参数、刀具几何形状及刀具与工件的相对运动来表征 ,通过将预测的表面粗糙度轮廓线性映射到网格面元上来生成已加工表面的形貌。实际的加工和测量实验表明 ,仿真的三维表面形貌和由激光干涉形貌仪测量得到的三维形貌具有很好的相似性。该模型可用来确定如刀具切削运动的迹线、表面波度等表面特征。

This paper describes a model for the simulation of 3 D surface topography in ultra-precision diamond turning.In the model,the kinematics of the diamond turning process is characterized by machining parameters,the tool geometry as well as the relative motion between the tool and the workpiece.The topography of the machined surface is generated by a linear mapping of the predicted surface roughness profiles on the surface elements of a cross lattice.Cutting experiments were carried out and good correlation is found between the simulated topography and the three-dimensional topography obtained from the optical interferometer.The model can also help to identify surface features like traces of tool motion and surface waviness.