超精密光学非球曲面磨削系统的研制

Development of Ultra-precision Optical Aspheric Grinding System

为磨削加工出高精度、高质量的非球曲面器件 ,从理论上分析影响已加工表面粗糙度、轮廓精度的各种主要因素 ;设计研制一套超精密非球曲面磨削系统 ,其工件主轴、横溜板、纵溜板及磨头主轴均采用气浮形式 ,工件主轴的回转精度为 0 .0 5μm,磨头主轴最高转速为 80 0 0 0 r/min,其回转精度为 0 .1 μm,横溜板和纵溜板的直线位移分辨率可达 4 .9nm,而磨头中心高微调机构可实现 0 .1 μm的精确微调 ;用已经研制成功的这套磨削系统进行了非球曲面的磨削实验 ,结果表明 ,其磨削加工的零件轮廓精度为 0 .4 μm,表面粗糙度 Ra优于0 .0 1 μm。

For grinding an aspheric part with high precision and high quality,in the paper, firstly the influence factors on surface roughness and profiles accuracy of machined surfaces was analyzed theoretically.Afterwards,authors designed and built the ultra-precision aspheric grinding system.The workpiece spindle ,traverse guide, longitudinal guide and spindle of the grinding wheel were of gaseous form.Rotating error of the workpiece spindle was in 0 05 μm, the highest speed of the grinder was of 80 000 r/min and the rotating error was in 0 1 μm, the resolution of linear displacement of the traverse and longitudinal guide was 4 9nm. Micro-adjustive error of the micro-adjustive mechanism was in 0 1 μm. At last,the grinding system was used in ultra-grinding aspheric part. Grinding result was shown that profiles error was in 0 4 μm and the surface roughness value was less than 0 01 μm.