脆性单晶材料的各向异性对金刚石切削表面质量影响的研究

The Research of Effects of Brittle Single Crystal Material’s Anisotropy on the Diamond Turned Surface Quality

从晶体结构的各向异性特性出发 ,对各个滑移系、解理系优先产生解理或滑移给出合理的判据 ,揭示单晶材料已加工表面粗糙度呈扇形分布的原因 ,研究能够消除这种扇形分布的加工方法 ;在此基础上 ,首次应用原子力显微镜对脆性单晶材料的金刚石切削表面明暗区域的微观形貌进行观察 ,很好地验证了该判据的正确性。

Based on the anisotropy of granular structure, the reasonable criterion was given to understand the generation of the prior cleavage or slip for each cleavage system or slip system. The phenomenon that the roughness of the diamond turned single crystal material's surface distributes in scallops is explained, and a turning method is presented to eliminate the scallops distribution. Besides,Atom Force Microscope (AFM)was used to observe the micro-topography of the light and shade area of brittle single crystal material's diamond turned surface. The criterion is in good agreement with the observed results.