光栅式大量程高分辨率位移测量研究

Research for Wide Range and High Resolution Displacement Measurement with Grating

提出一种光栅式位移测量新方法 ,利用单个普通低线数计量光栅 ,实现高分辨率、大量程的位移测量。给出测量光路图 ,分析测量原理 ,最后介绍初步原理实验及结果。

A new method of displacement measurement using single grating is put forward in the paper. Wide range and high resolution displacement measurement is realized by a general coarse metric-grating and a spectroscope. The method solves the traditional problem that high frequency grating can't be manufactured too long. The optical configuration and the principle of measurement are presented in the paper. Its feasibility is proved by experiments.In the experiments, a metric-grating with frequency of 50l/mm is used and optical subdivision more than 32 is received.