摘要
采用多弧离子镀技术在TC11钛合金基体上沉积了TiAlN涂层。金相截面组织观察和扫描电镜表面形貌照片显示,制备出的膜层连续、光滑、孔隙率低、组织致密;X射线衍射分析表明,膜层的相结构中大致含有以下组成相:(Ti,Al)N、Ti2AlN、Ti。用EDS能谱分析对膜层中的元素含量进行了测定,发现Al元素出现了成分负偏析。性能测试表明,TiAlN膜具有较高的硬度和膜/基结合力。
TiA1N coating was deposited on TC11 titanium alloy by multi-arc ion plating technique. Through metallograph on cross section and electron microscope, continuous, smooth, low-porosity and tight films can be seen. X-ray diffraction analysis （XRD） show that the films mainly have the following phases： （Ti, A1）N, Ti2A1N, Ti. Finally, the EDS is used to measure the element contents of TiA1N films.The content of AI in the TiAIN film was found to be less than that in the target. Properties experiments show that TiA1N films have high micro-hardness and film-matrix strength.
出处
《热喷涂技术》
2012年第3期84-88,共5页
Thermal Spray Technology
