MoS_x掺杂DLC薄膜的摩擦磨损行为Ⅱ:速度的影响

Friction and Wear Behaviors of MoS_x-doped DLC films Ⅱ: Effect of Sliding Speed

采用RF-PECVD与磁控溅射复合技术制备了MoSx掺杂的DLC(a-C:H:Mo:S)薄膜,并对其组成、表面形貌、纳米硬度及热稳定性进行了分析.在QG-700摩擦试验机上考察了其在不同滑动速度下的摩擦行为.通过对摩擦表面的光学显微观察、扫描电镜(SEM)观察及能谱(EDS)分析,简单探讨了其摩擦磨损机理.结果表明:随着速度的增加,a-C:H:Mo:S/Si3N4体系的摩擦系数先升高后降低,而磨损率则表现出相反的变化趋势.分析认为摩擦系数的升高与高湿度下薄膜表面的氧化反应有关,而降低则主要是由于石墨化所致.

（ MoSx ） - doped diamond - like carbon （ a - C ： H ： Mo ： S） films were prepared using a hybrid radio frequency plasma- enhanced chemical vapor deposition and unbalanced magnetron sputtering deposition technique. Their composition, surface topography, nanohardness and thermal stability were investigated. Friction and wear tests at different sliding speed were conducted on a QG -700 tribometer. The friction and wear mechanism was briefly discussed based on the characterizations of frictional surfaces by optical microscope, scanning electron microscopy and energy dispersive spectrometer. The results reveal that the friction coefficient first increases and then decreases with increasing sliding speed,while the wear rate just varies oppositely. The increase in friction coefficient is due to the aggravated surface oxidization in high -humidity environment, but the decrease is most likely due to the friction -induced graphitization.