基于相位跟踪原理的超精密定位平台研究

Research on ultra-precision positioning platform based on phase tracking

为了满足超精密定位的需求,介绍了一种基于相位差跟踪的定位原理;针对该方法的具体要求,详细描述了系统的工作过程并设计完成了该定位系统,分别就定位系统关键的高频信号的发生、调理、鉴相以及驱动等模块进行了深入研究;对系统输出的线性度、迟滞、重复性和稳定性等指标进行了实验,并在考虑整个定位系统的组成部件、仪器设备等环节影响的基础上,进行了最终的定位系统不确定度合成,数据显示该定位系统最终的位移不确定度为6.10 nm。

This paper introduces a new positioning method based on phase tracking. A system is designed to meet the demand of ultra-precision positioning. The signal generation, conditioning, phase demodulation and driving circuit modules are described in detail. Lots of experiments were performed to test the linearity, hysteresis, repeatability and stability errors. The uncertainty of the system is synthesized based on the tested data; and the results show that the displacement uncertainty is less than 6.10 nm.