半导体异质结定向耦合器的设计

Design of Semiconductor Hetero-Structure Directional Coupler

本文根据半导体材料的特点,分析比较了几种不同结构的条波导在构成定向耦合器时,对器件性能产生的影响.从而选定异质结加载条波导构成我们的器件.依据平面波传输可等效为传输线传输的原理,求解出具有多层结构的平面波导的特征方程,应用等效折射率法和耦合模理论,结合现有工艺条件,借助计算机对波导结构参数与器件参数之间的关系进行了数值模拟.经过优选之后,给出了几个实用InP-InGaAsP 单模定向耦合器的设计值.

According to the properties of semiconductor,several kinds of strip waveguide structures of a directional coupler are studied.We present a hereto-structure strip-loaded film waveguide which is suitable to coupling.Using the principle of plane wave pro- pagation equivalent to transmission line,we derive the eigenvalue equation of multi- layer plane waveguide.On the bases of equivalent refractive index method and coupl- ing mode theory,taking account of the technological conditions,we obtain the rela- tionship of waveguide structure and device parameters by means of numerical simula- tion.Through optimization,several design results of physical InP-InGaAsP monomode direcectional couplers are given