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激光干涉仪面形检测结果与N、△N对应关系的探讨

Study of Corresponding Relation between the Form Testing Results with Laser interferometer and N,△N
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摘要 随着以Zygo激光干涉仪为代表的面形检测仪器在我国的普及和应用,对光学加工和检验人员来说,如何将激光干涉仪测试结果中的参数,如PV、SAG、IRR等与我国光学零件制图标准中的指标N、△N之间建立一定的对应关系,就显得尤为重要和迫切。本文介绍了上述测量方法的原理,对相关指标进行了说明,在实际检测的基础上,应用统计的方法,对所得结果进行计算、分析和对比,试图找出PV、SAG、IRR等参数与N、△N之间的联系,供光学加工和检验人员参考。 In China, with the application and popularization of the testing equipments used for surface accuracy testing as Zygo laser interferometer, how to establish the corresponding relation between the measurement parameters of the laser interferometer(such as PV, SAG, IRR and so on) and the indexes of N,△N, which defined in Chinese optical parts drawing standards, is so important and urgent for the persons of optical production and inspection. This article introduces the principle of above measuring method, describes the meaning of the main indexes. And then, base on the practical testing results, the date are processed by statistical methods to try to find out the relation between the PV, SAG IRR and N,△N, which can provide a reference for those related people.
作者 陈岩 谢启明
出处 《云光技术》 2012年第2期14-22,共9页
关键词 面形检测 干涉仪 N △N form test, interferometer, N,△N

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