摘要
以溶胶一凝胶法在Pt／Ti／Si02／Si（111）基底上制备了厚度为30～1110nm的0．7BiFeO3．0．3PbTiO3（0．7BFO-0．3PT）薄膜，研究了薄膜厚度对0．7BFO-0．3PT薄膜的结构与电学性能的影响。结果表明，随着膜厚的增加，晶格常数C与日的比值c／a以及晶粒尺寸都呈现先增大后减小的趋势，但其剩余极化强度及介电常数却均与薄膜厚度呈正比。厚度为180nm的0．7BFO-0．3PT薄膜具有最大的矫顽场（2．99×10^5V／cm）和晶粒均匀度（42nm），同时其品格常数比c／a也达到最大，为1．1299。
0.7BiFeOa-0.3PbTiO3 （0.7BFO-0.3PT） thin films with thicknesses of 30-1 110 nm were fabricated by sol-gel method on Pt/Ti/SiO2/Si（Ill） substrate. The effects of film thickness on structure and electric properties of 0.7BFO-0.3PT films were studied. The results show that with the the increasing of film thickness, the lattice constant ratio c/a increases firstly and then decreases, while the grain size possesses the same changing trend. However, the remanent polarization and permittivity are proportional to the film thickness. The 0.7BFO-0.3PT film with thickness of 180 nm possesses the maximal coercive electric field （2.99Ф×10^5 V/cm） and grain uniformity valuing （42 nm）, and the lattice constant ratio c/a reaches the maximum of 1.129 9 simultaneously.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2012年第11期39-42,共4页
Electronic Components And Materials
基金
上海市纳米技术专项资助项目(No.1052nm07300)
关键词
薄膜
结构
电学性能
厚度效应
thin films
structure
electric properties
influence of thickness
