摘要
选取3种平均粒径分别为0.2、0.5和1μm的钨粉,将任意2种钨粉按一定的质量比混合后与氧化铝陶瓷共烧,得到氧化铝陶瓷的金属化层,研究钨粉颗粒级配对氧化铝陶瓷金属化方阻的影响。结果表明,钨金属化层的方阻与其烧结致密化程度直接相关,钨金属化层越致密,其表面方阻越低。单独使用其中1种粒度的钨粉与氧化铝陶瓷共烧时,金属化方阻较高。将0.5μm和1μm钨粉混合能显著降低方阻,当两者质量比为45:55时得到的金属化方阻最小(12.10 m/□)。混合钨粉的累积分布曲线符合Dinger-Funk粉体堆积公式,分布模数n越接近0.37,其烧结致密化程度越高,金属化方阻越低。
The effect of particle size distribution of tungsten powders on sheet resistance of alumina ceramic metallization was investigated in the present paper.Three kinds of tungsten powder with average particle size of 0.2,0.5 and 1 μm were adopted,two of them were mixed in accordance with an certain mass fraction and co-sintered with alumina ceramic.It is found that the sheet resistance strongly depends on the sintered densification of tungsten metallization.The more dense of the tungsten metallization,the lower sheet resistance can be achieved.Using single particle size of tungsten powder can leads to relatively high sheet resistance.The mixture of 0.5 μm and 1 μm tungsten powders co-sintered with alumina ceramic can reduce the sheet resistance sharply,and the minimum sheet resistance is found to be 12.10 m /□ when the mass ratio of the 0.5 μm and 1μm powder is 45：55,which is lower than that of using single type of tungsten powder.It is also found that the volume cumulative distribution of the mixed tungsten powder fitts the Dinger-Funk equation well.High density and low sheet resistance of tungsten metallization can be obtained when the distribution modulus n is close to 0.37.
出处
《粉末冶金材料科学与工程》
EI
北大核心
2012年第5期579-585,共7页
Materials Science and Engineering of Powder Metallurgy
基金
国家重点基础研究发展规划(973计划资助项目(2006CB605207)
中国博士后科学基金资助项目(11175020)
北京科技大学基本科研业务费资助项目(FRF-TP-12-154A)
