硅微机械谐振式压力传感器闭环方法

Closed loop control of silicon micromachined resonant pressure sensors

提高硅微机械谐振式压力传感器的性能指标有很多方法,如何对已知敏感结构的输出量程范围内所有谐振频率点进行实时闭环跟踪是其中之一。对几种比较常用硅微机械谐振式压力传感器的激励-拾振方式进行介绍,对所调研的国内外文献给出的谐振式微结构传感器闭环控制方法进行比较分析,提出一种新的针对电热激励-压阻拾振方式的复合敏感结构进行闭环控制的方法,同时给出了提高该类型传感器性能的有效手段和研究方向。

Improving the silicon micromachined resonant pressure sensor＇s performance index have a lot of methods, how to track all the resonance frequency point in real time closed loop about known sensitive structure of the output range is one of them. First, several commonly used excited-detected ways of silicon micromachined resonant pressure sensor is introduced, and carry the comparative analysis on domestic and foreign literature given closed-loop control method to resonant sensor, then give an improved way to closed loop controlling of a electrothermally excited-detected by a piezoresistor resonant pressure sensor, and gives out to improve the performance of the sensor all kinds of effective means and research direction.